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Oral History – Jack Haenichen
(Continued)
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Anyway,
we started trying to replicate the (silicon) work - we knew the TI stuff
was passé. By this time, all the guys that had been at Shockley left and
went to Fairchild. Fairchild Camera and Instrument out of Long Island started this operation in Mountain View Ca. They hired this premier group,
including Bob Noyce. As you know Hoerni had the planar patent, and Noyce
had the metal over oxide, which was very important for creating integrated
circuits. That was a really, really big contribution.
6) Was Motorola
Semiconductor set up to develop the silicon transistor technology?
They
had a production group which was making essentially three products:
germanium power transistors, rectifiers, and zener diodes. And they wanted
to get into the small signal transistor business. So, that’s what we were
working on. Later on, they established a central research unit which
worked on exotic things like epitaxial growth and other things. They had a
materials department. Wilf Corrigan worked in the materials department.
He was really good, an energetic guy, and he was working on everything,
including epitaxial growth, and he was very instrumental in their success.
He eventually moved over to the device end of it on the production side.
He manufactured all the stuff that guys like me designed.
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Oral History – Jack Haenichen
(Continued)
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I was a
device designer and also a process designer. To make a modern device, you
had to not only design the physical structure, which is the device itself,
but you had to come up with a method to make it. Patent work, by the way,
reflects this – there are two kinds of patents, structure patents and
method patents. I was able to achieve both of those for the annular
transistor.
7) What was the first
device type you worked on at Motorola?
The
first type was an NPN bipolar transistor, which was essentially replicating
the work of Fairchild. These were planar types, and we never made any
silicon mesas, and I never worked in germanium. Other guys were working in
germanium and making the mesa transistors. They developed quite a business
around that. I was working on silicon planar transistors, and six to eight
months after, we were able to build NPN bipolar transistors, using the
photolithographic technique.
8) Were these the first
silicon transistors at Motorola?
Yes, they
were. And we never made any of the older types of silicon junction
transistors. They only made the diffused and then later, the epitaxial
diffused transistors.
Go
To Haenichen Oral History, Page 6
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